Xu Kaichuan, Jiang Chunlei, Ban Qilu, Dai Pan, Fan Yaqiang, Yang Shijie, Zhang Yue, Wang Jiacheng, Wang Yu, Chen Xiangfei, Zeng Jie, Wang Feng
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China.
College of Electrical and Information Engineering, Northeast Petroleum University, Daqing 163318, China.
Sensors (Basel). 2023 Nov 15;23(22):9196. doi: 10.3390/s23229196.
We present a microsphere-based microsensor that can measure the vibrations of the miniature motor shaft (MMS) in a small space. The microsensor is composed of a stretched fiber and a microsphere with a diameter of 5 μm. When a light source is incident on the microsphere surface, the microsphere induces the phenomenon of photonic nanojet (PNJ), which causes light to pass through the front. The PNJ's full width at half maximum is narrow, surpassing the diffraction limit, enables precise focusing on the MMS surface, and enhances the scattered or reflected light emitted from the MMS surface. With two of the proposed microsensors, the axial and radial vibration of the MMS are measured simultaneously. The performance of the microsensor has been calibrated with a standard vibration source, demonstrating measurement errors of less than 1.5%. The microsensor is expected to be used in a confined space for the vibration measurement of miniature motors in industry.
我们展示了一种基于微球的微传感器，它能够在小空间内测量微型电机轴（MMS）的振动。该微传感器由一根拉伸光纤和一个直径为5μm的微球组成。当光源入射到微球表面时，微球会引发光子纳米喷流（PNJ）现象，使光向前传播。PNJ的半高宽很窄，超越了衍射极限，能够精确聚焦在MMS表面，并增强从MMS表面发出的散射光或反射光。使用两个所提出的微传感器，可以同时测量MMS的轴向和径向振动。该微传感器的性能已通过标准振动源进行校准，测量误差小于1.5%。预计该微传感器将用于工业中微型电机振动测量的受限空间。
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