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用于相移轮廓术的投影光源不稳定性及实时相位误差校正方法

Instability of projection light source and real-time phase error correction method for phase-shifting profilometry.

作者信息

Chen Cheng, Wan Yingying, Cao Yiping

出版信息

Opt Express. 2018 Feb 19;26(4):4258-4270. doi: 10.1364/OE.26.004258.

DOI:10.1364/OE.26.004258
PMID:29475277
Abstract

The time-dependent phase error induced by the instability of projection light source (IPLS) is systematically studied for phase-shifting profilometry (PSP). The IPLS of the projection device is investigated by a specially designed experimental setup. Based on the results of the investigation, a new mathematical model to analyze the time-dependent phase error induced by IPLS is established and verified. Two real-time phase error correction methods using a new designed three-dimensional shape measurement system are proposed for the effect of IPLS. Experimental results demonstrate the two methods can effectively eliminate the induced time-dependent phase error with a good robustness and high accuracy. The two real-time correction methods for PSP will be promising for high-accuracy measurements.

摘要

针对相移轮廓术(PSP),系统研究了由投影光源不稳定性(IPLS)引起的随时间变化的相位误差。通过专门设计的实验装置对投影设备的IPLS进行了研究。基于研究结果,建立并验证了一个用于分析IPLS引起的随时间变化的相位误差的新数学模型。针对IPLS的影响,提出了两种使用新设计的三维形状测量系统的实时相位误差校正方法。实验结果表明,这两种方法能够有效消除所引起的随时间变化的相位误差,具有良好的鲁棒性和高精度。PSP的这两种实时校正方法在高精度测量方面具有广阔前景。

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