Central Research Laboratory , Bharat Electronics , Bangalore 560013 , India.
ACS Appl Mater Interfaces. 2018 May 16;10(19):16918-16923. doi: 10.1021/acsami.8b05032. Epub 2018 May 8.
Nonpolar a-plane GaN epitaxial films were grown on an r-plane sapphire using the plasma-assisted molecular beam epitaxy system, with various nitrogen plasma power conditions. The crystallinity of the films was characterized by high-resolution X-ray diffraction and reciprocal space mapping. Using the X-ray "rocking curve-phi scan", [0002], [1-100], and [1-102] azimuth angles were identified, and interdigitated electrodes along these directions were fabricated to evaluate the direction-dependent UV photoresponses. UV responsivity ( R) and internal gain ( G) were found to be dependent on the azimuth angle and in the order of [0002] > [1-102] > [1-100], which has been attributed to the enhanced crystallinity and lowest defect density along [0002] azimuth. The temporal response was very stable irrespective of growth conditions and azimuth angles. Importantly, response time, responsivity, and internal gain were 210 ms, 1.88 A W, and 648.9%, respectively, even at a bias as low as 1 V. The results were validated using the Silvaco Atlas device simulator, and experimental observations were consistent with simulated results. Overall, the photoresponse is dependent on azimuth angles and requires further optimization, especially for materials with in-plane crystal anisotropy.
采用等离子体辅助分子束外延系统,在 r 面蓝宝石上生长了非极性 a 面 GaN 外延薄膜,并采用了不同的氮等离子体功率条件。采用高分辨率 X 射线衍射和倒易空间映射对薄膜的结晶度进行了表征。通过 X 射线“摇摆曲线-phi 扫描”,确定了[0002]、[1-100]和[1-102]方位角,并沿着这些方向制作了叉指电极,以评估各向异性的紫外光光响应。发现紫外光响应度(R)和内部增益(G)依赖于方位角,顺序为[0002]>[1-102]>[1-100],这归因于沿[0002]方位角增强的结晶度和最低的缺陷密度。无论生长条件和方位角如何,时间响应都非常稳定。重要的是,响应时间、响应度和内部增益分别为 210ms、1.88AW 和 648.9%,即使在低至 1V 的偏置下也是如此。结果使用 Silvaco Atlas 器件模拟器进行了验证,实验观察与模拟结果一致。总的来说,光响应依赖于方位角,需要进一步优化,特别是对于具有面内晶体各向异性的材料。