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基于光栅辅助反向耦合器的聚合物/二氧化硅混合集成加/-drop 滤波器。

Polymer/silica hybrid integration add-drop filter based on grating-assisted contradirectional coupler.

出版信息

Opt Lett. 2018 May 15;43(10):2348-2351. doi: 10.1364/OL.43.002348.

Abstract

A polymer/silica hybrid integration add-drop filter based on a grating-assisted contradirectional coupler fabricated through simple and low-cost contact lithography is proposed. First, the structure pattern of the add-drop filter was formed in the lower silica cladding by contact lithography and inductively coupled plasma (ICP) etching. Then an SU-8 film was fabricated on top of it by a spin-coating method, and an inverted-rib waveguide structure was formed. Next, the slab layer of the inverted-rib waveguide was removed by ICP etching. We observe a rejection band with an extinction ratio of 13 dB and a 3 dB bandwidth of 0.6 nm at a wavelength of 1509.4 nm from the through port, and a passband with a side-mode suppression ratio of 12 dB and a 3 dB bandwidth of 0.5 nm at a wavelength of 1509.4 nm from the drop port. The shift of the passband with a temperature over the range of 25-55°C is approximately 4.8 nm. This temperature dependence exhibits an average slope of -0.16  nm/°C.

摘要

提出了一种基于光栅辅助反向耦合器的聚合物/二氧化硅混合集成的上下行滤波器,该滤波器通过简单且低成本的接触光刻技术制造。首先,通过接触光刻和感应耦合等离子体(ICP)刻蚀在较低的二氧化硅包层中形成了滤波器的结构图案。然后,通过旋涂法在其顶部制备了 SU-8 薄膜,并形成了倒脊波导结构。接下来,通过 ICP 刻蚀去除了倒脊波导的平板层。我们从直通端口观察到一个在波长为 1509.4nm 处具有 13dB 消光比和 0.6nm 3dB 带宽的反射带,以及从下端口观察到一个在波长为 1509.4nm 处具有 12dB 边模抑制比和 0.5nm 3dB 带宽的通带。在 25-55°C 的温度范围内,通带的偏移约为 4.8nm。这种温度依赖性的平均斜率为-0.16nm/°C。

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