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采用沉积后蚀刻的滴涂法制备周期性聚苯乙烯纳米球阵列及其在提高InGaN/GaN发光二极管光提取效率中的应用

Preparation of a Periodic Polystyrene Nanosphere Array Using the Dip-Drop Method with Post-deposition Etching and Its Application of Improving Light Extraction Efficiency of InGaN/GaN LEDs.

作者信息

Lei Po-Hsun, Yang Chyi-Da, Yang Yong-Sian, Lin Jian-Hong

机构信息

Institute of Electro-Optical and Materials Science, National Formosa University, 64 Wen-Hwa Rd, Hu-Wei, 623, Yun-Lin, Taiwan.

Department of Microelectronic Engineering, National Kaohsiung Marine University, Kaohsiung, 811, Taiwan.

出版信息

Nanoscale Res Lett. 2018 Jun 15;13(1):180. doi: 10.1186/s11671-018-2595-1.

Abstract

In this study, we synthesized a periodic polystyrene nanosphere (PS NS) array using the dip-drop method with post-deposition etching to improve the light extraction efficiency (LEE) of InGaN/GaN light-emitting diodes (LEDs). The dip-drop method has advantages such as simple procedure, inexpensive equipment, room temperature deposition, and easy implementation in LEDs. The arrangement of PS NSs on an indium-tin-oxide (ITO)-coated glass substrate depends on the average dip-drop speed and the concentration of the PS NS suspension. The periodic PS NS array can modulate the in-plane wave vector of emission light from a semiconductor to free space and thus increase the escape probability. The calculated and experimental results indicated that the light output intensity of the InGaN/GaN LEDs can be improved by using the periodic PS NS array as a window layer; this array comprises PS NSs with a diameter of 100 nm separated with periods of 100 and 100 nm in the x and y directions. Because of the improved LEE, the InGaN/GaN LEDs with the optimal PS NS array window layers exhibited a 38% increase in light output intensity compared with the conventional InGaN/GaN LEDs under 20-mA driving current.

摘要

在本研究中,我们采用滴涂法并结合沉积后蚀刻工艺合成了一种周期性聚苯乙烯纳米球(PS NS)阵列,以提高氮化铟镓/氮化镓发光二极管(LED)的光提取效率(LEE)。滴涂法具有诸如步骤简单、设备成本低、室温沉积以及易于在LED中实施等优点。PS NS在氧化铟锡(ITO)涂层玻璃基板上的排列取决于平均滴涂速度和PS NS悬浮液的浓度。周期性PS NS阵列可以将来自半导体的发射光的面内波矢调制到自由空间,从而提高逃逸概率。计算和实验结果表明,通过使用周期性PS NS阵列作为窗口层,可以提高氮化铟镓/氮化镓LED的光输出强度;该阵列由直径为100 nm的PS NS组成,在x和y方向上的周期分别为100和100 nm。由于LEE得到改善,在20 mA驱动电流下,具有最佳PS NS阵列窗口层的氮化铟镓/氮化镓LED与传统氮化铟镓/氮化镓LED相比,光输出强度提高了38%。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6509/6002332/d26de169ef30/11671_2018_2595_Fig1_HTML.jpg

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