DNA辅助分子光刻技术

DNA-Assisted Molecular Lithography.

作者信息

Shen Boxuan, Linko Veikko, Toppari J Jussi

机构信息

Department of Physics, Nanoscience Center, University of Jyväskylä, Jyväskylä, Finland.

Biohybrid Materials, Department of Bioproducts and Biosystems, Aalto University, Aalto, Finland.

出版信息

Methods Mol Biol. 2018;1811:299-314. doi: 10.1007/978-1-4939-8582-1_20.

DOI:10.1007/978-1-4939-8582-1_20

PMID:29926461

Abstract

During the past decade, DNA origami has become a popular method to build custom two- (2D) and three-dimensional (3D) DNA nanostructures. These programmable structures could further serve as templates for accurate nanoscale patterning, and therefore they could find uses in various biotechnological applications. However, to transfer the spatial information of DNA origami to metal nanostructures has been limited to either direct nanoparticle-based patterning or chemical growth of metallic seed particles that are attached to the DNA objects. Here, we present an alternative way by combining DNA origami with conventional lithography techniques. With this DNA-assisted lithography (DALI) method, we can create plasmonic, entirely metallic nanostructures in a highly accurate and parallel manner on different substrates. We demonstrate our technique by patterning a transparent substrate with discrete bowtie-shaped nanoparticles, i.e., "nanoantennas" or "optical antennas," with a feature size of approximately 10 nm. Owing to the versatility of DNA origami, this method can be effortlessly generalized to other shapes and sizes.

摘要

在过去十年中，DNA折纸术已成为构建定制二维（2D）和三维（3D）DNA纳米结构的常用方法。这些可编程结构可进一步用作精确纳米级图案化的模板，因此可用于各种生物技术应用。然而，将DNA折纸术的空间信息转移到金属纳米结构上，一直局限于基于纳米颗粒的直接图案化或附着在DNA物体上的金属种子颗粒的化学生长。在此，我们提出一种将DNA折纸术与传统光刻技术相结合的替代方法。通过这种DNA辅助光刻（DALI）方法，我们可以在不同基板上以高度精确且并行的方式创建等离子体、完全金属化的纳米结构。我们通过在透明基板上图案化离散的领结形纳米颗粒，即“纳米天线”或“光学天线”，其特征尺寸约为10纳米，来展示我们的技术。由于DNA折纸术的通用性，这种方法可以轻松推广到其他形状和尺寸。