Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083, People's Republic of China. College of Materials Science and Optoelectronic Technology, University of Chinese Academy of Sciences, Beijing 100049, People's Republic of China.
Nanotechnology. 2018 Oct 5;29(40):405601. doi: 10.1088/1361-6528/aad2f4. Epub 2018 Jul 12.
We report the realization of defect-free InAsSb nanowire (NW) arrays on Si substrates by selective-area metal-organic chemical vapor deposition. We studied the effects of growth temperature and the morphology of patterned Si/SiO substrates on the formation of InAsSb NW arrays, and found that both the morphology and the yield of the NW arrays were sensitive to the growth conditions. By optimizing the growth conditions, we achieved high-quality InAsSb NW arrays, which exhibited a pure zinc-blende crystal structure without any defects. In addition, based on the as-grown NWs, we fabricated back-gated field effect transistors devices that showed an electron mobility of 2000 cm V s at room temperature.
我们通过选择区域的金属有机化学气相沉积法在 Si 衬底上实现了无缺陷的 InAsSb 纳米线(NW)阵列。我们研究了生长温度和图案化 Si/SiO 衬底的形态对 InAsSb NW 阵列形成的影响,发现 NW 阵列的形态和产率都对生长条件很敏感。通过优化生长条件,我们实现了高质量的 InAsSb NW 阵列,其具有纯闪锌矿晶体结构,没有任何缺陷。此外,基于生长的 NW,我们制造了背栅场效应晶体管器件,其在室温下表现出 2000 cm V s 的电子迁移率。