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利用ScAlN压电薄膜换能器诱导的相干声子通过布里渊散射进行快速波速测量

Rapid Wave Velocity Measurement by Brillouin Scattering Using Coherent Phonons Induced by ScAlN Piezoelectric Thin-Film Transducer.

作者信息

Kawabe Masahiko, Takayanagi Shinji, Ichihashi Hayato, Suzuki Masashi, Yanagitani Takahiko, Matsukawa Mami

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2018 Oct;65(10):1882-1887. doi: 10.1109/TUFFC.2018.2854710. Epub 2018 Jul 19.

Abstract

It is difficult to perform 2-D imaging of elastic properties using the Brillouin scattering technique because the weak thermal phonon signal in the sample leads to low measurement accuracy and long measurement times. To improve the phonon signal, we artificially induced acoustic phonons using a ScAlN thin-film piezoelectric transducer, which has a giant piezoelectricity. The film was grown using RF magnetron sputtering of a ScAl alloy target on a silica glass bar sample. Using a microwave probe, the electric power applied to the film was 1 mW at 875 MHz. We obtained the enhancement of the Brillouin scattering signal in the silica glass bar sample due to the induced phonons. Compared with and without the induced phonons from the ScAlN film transducer, the peak intensity improved by nearly 3 orders of magnitude. This technique can significantly shorten the time required for the Brillouin scattering measurements.

摘要

使用布里渊散射技术进行弹性特性的二维成像很困难,因为样品中微弱的热声子信号导致测量精度低且测量时间长。为了改善声子信号,我们使用具有巨大压电性的ScAlN薄膜压电换能器人工诱导出声学声子。该薄膜是通过在石英玻璃棒样品上对ScAl合金靶进行射频磁控溅射生长而成。使用微波探头,在875 MHz时施加到薄膜上的电功率为1 mW。我们在石英玻璃棒样品中由于诱导声子而获得了布里渊散射信号的增强。与没有来自ScAlN薄膜换能器的诱导声子相比,峰值强度提高了近3个数量级。该技术可以显著缩短布里渊散射测量所需的时间。

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