Acoustic Wave Velocities and Refractive Indices in an m-Plane GaN Single Crystal Plate and c-Axis Oriented ScAlN Films Measured by Brillouin Scattering Techniques.

We have experimentally investigated wave velocities and refractive indices in bulk and film samples [a GaN single crystal plate and c-axis-oriented ScxAl(1-x)N (x = 0.00-0.63) films] by Brillouin scattering. All of the piezoelectrically unstiffened elastic constants and the ordinary refractive index of the GaN single crystal plate were determined from the reflection induced A (RIA) scattering geometry and the combination of 90R and 180° scattering geometries. The uncertainties of the measured wave velocities were approximately 0.17% (RIA) and 2.5% (combination technique). In addition, the longitudinal wave velocities of ScxAl(1-x)N films propagating in the normal direction were obtained by the combination technique. The maximum uncertainty was approximately 3.3%. The shear wave velocities and refractive indices of ScxAl(1-x)N films were also investigated by the 90R scattering geometry using velocities measured by high-overtone bulk acoustic resonators. The softening trends of the elasticity were obtained from the measured longitudinal and shear wave velocities, although there were large uncertainties in the Brillouin measurement system owing to thermal instability.