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理解不同纳秒激光脉冲持续时间下铍铜相互作用特性。

Understanding of BeCu Interaction Characteristics with a Variation of ns Laser-Pulse Duration.

作者信息

Lee Dongkyoung

机构信息

Department of Mechanical and Automotive Engineering, Kongju National University, Cheonan 31080, Korea.

出版信息

Materials (Basel). 2018 Aug 13;11(8):1423. doi: 10.3390/ma11081423.

DOI:10.3390/ma11081423
PMID:30104525
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6120012/
Abstract

An inspection process using a Spring Contact Probe (SCP) is an essential step in the semiconductor-manufacturing process. Many plungers, which are the main body of the SCP, are manufactured by a stamping process. After the stamping process, mechanical cutting is applied and the plunger body may be damaged. Thus, to improve cut quality and productivity while minimizing body damage, laser spot cutting can be used. To fully utilize this technology, it is necessary to investigate interaction characteristics of beryllium copper (BeCu) during laser spot cutting. Effects of a total irradiated laser-pulse energy (1 mJ ~1000 mJ ) and pulse duration (100 ns ~8 ns ) on the material-removal zone, thermal depth, and crater size are examined. The crater size can be affected by the localization of heating dominantly. An incubation model is applied to investigate the correlation between crater size and laser-pulse energy. Surface morphology characteristics such as edge separation, small particles, spatter motion, and soaring-up motion are observed.

摘要

使用弹簧接触探针（SCP）的检测过程是半导体制造过程中的一个重要步骤。许多作为SCP主体的柱塞是通过冲压工艺制造的。冲压工艺之后，进行机械切割，柱塞主体可能会受损。因此，为了在尽量减少主体损伤的同时提高切割质量和生产率，可以使用激光点焊。为了充分利用这项技术，有必要研究铍铜（BeCu）在激光点焊过程中的相互作用特性。研究了总辐照激光脉冲能量（1 mJ至1000 mJ）和脉冲持续时间（100 ns至8 ns）对材料去除区、热影响深度和凹坑尺寸的影响。凹坑尺寸主要受加热局部化的影响。应用一个孕育模型来研究凹坑尺寸与激光脉冲能量之间的相关性。观察了诸如边缘分离、小颗粒、飞溅运动和飞腾运动等表面形态特征。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/baf14f905430/materials-11-01423-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/53490a02238d/materials-11-01423-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/9b5a5ddadaf1/materials-11-01423-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/bd8483662687/materials-11-01423-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/999106a774b1/materials-11-01423-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/4f5484445674/materials-11-01423-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/976be0dd1680/materials-11-01423-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/bd4beab07ea0/materials-11-01423-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/a97752feafd0/materials-11-01423-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/3a476408e7eb/materials-11-01423-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/347efa0b5290/materials-11-01423-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/baf14f905430/materials-11-01423-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/53490a02238d/materials-11-01423-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/9b5a5ddadaf1/materials-11-01423-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/bd8483662687/materials-11-01423-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/999106a774b1/materials-11-01423-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/4f5484445674/materials-11-01423-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/976be0dd1680/materials-11-01423-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/bd4beab07ea0/materials-11-01423-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/a97752feafd0/materials-11-01423-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/3a476408e7eb/materials-11-01423-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/347efa0b5290/materials-11-01423-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9fcd/6120012/baf14f905430/materials-11-01423-g011.jpg

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