Liu Keqin, Qin Liang, Zhang Xiaoxian, Zhu Jiadi, Sun Xinhao, Yang Ke, Cai Yimao, Yang Yuchao, Huang Ru
Key Laboratory of Microelectronic Devices and Circuits (MOE), Institute of Microelectronics, Peking University, Beijing 100871, China.
Faraday Discuss. 2019 Feb 18;213(0):41-52. doi: 10.1039/c8fd00113h.
Memristive devices based on electrochemical processes are promising candidates for next-generation memory and neuromorphic applications. The redox processes happening at the interfaces are crucial steps for the ionization as well as generation of counter charges, and are thus indispensable for successful resistive switching, but their detailed mechanism has not been fully clarified. Here, we study the interfacial redox reactions in the forming process of memristive devices based on valence change and electrochemical metallization, using high-resolution electron microscopy and electrostatic force microscopy observations. We show direct evidence for the anodic oxidation of oxygen ions and cathodic reduction of moisture in HfO2- and Ta2O5-based valence change cells, which could take place in different horizontal locations. We further found that the anodic reactions always led to more pronounced structural damage to the electrode, indicating the possibility of additional cathodic reactions without producing gaseous products. When an active electrode is present, oxidation of metal atoms takes place at the anodic interface instead. Further investigations on electrochemical metallization cells have identified Cu ionization and moisture reduction as the anodic and cathodic reactions, respectively, and formation of Cu nuclei at the cathodic interface was directly observed. These findings with microscopic evidence could facilitate future development of memristive devices.
基于电化学过程的忆阻器件是下一代存储器和神经形态应用的有前途的候选者。在界面处发生的氧化还原过程是电离以及产生反电荷的关键步骤,因此对于成功的电阻开关是不可或缺的,但其详细机制尚未完全阐明。在这里,我们使用高分辨率电子显微镜和静电力显微镜观察,研究基于价态变化和电化学金属化的忆阻器件形成过程中的界面氧化还原反应。我们展示了基于HfO2和Ta2O5的价态变化单元中氧离子的阳极氧化和水分的阴极还原的直接证据,这些反应可能发生在不同的水平位置。我们进一步发现,阳极反应总是导致对电极更明显的结构损伤,这表明在不产生气态产物的情况下可能发生额外的阴极反应。当存在活性电极时,金属原子的氧化发生在阳极界面。对电化学金属化单元的进一步研究分别确定了Cu的电离和水分的还原为阳极和阴极反应,并直接观察到在阴极界面形成了Cu核。这些有微观证据的发现有助于忆阻器件的未来发展。