Koh Domin, Wang Anyang, Schneider Phil, Bosinski Brett, Oh Kwang W
SMALL (Sensors and MicroActuators Learning Lab), Department of Electrical Engineering, State University of New York at Buffalo (SUNY-Buffalo), Buffalo, NY 14260, USA.
Micromachines (Basel). 2017 Sep 15;8(9):280. doi: 10.3390/mi8090280.
Polydimethylsiloxane (PDMS) is a flexible and biocompatible material widely used in the fabrication of microfluidic devices, and is often studied for the fabrication of flexible electrodes. The most popular method of fabricating a flexible electrode using PDMS is done by transferring a metal electrode onto said PDMS. However, the transfer process is difficult and the transferred metal layer is easily damaged due to inherently weak adhesion forces between the metal and PDMS, thus requiring a chemical treatment or sacrificial layer between the two. The fabrication process using a chemical treatment or sacrificial layer is complicated and expensive, which is the major limitation of using PDMS in the fabrication of flexible electrodes. This paper discusses the findings of a possible solution to create strong bonding between PDMS and various metals (copper, nickel and silver) using a chemical-free metal to PDMS thermal bonding technique. This method is the same as the PDMS curing process, but with a variation in the curing condition. The condition required to create strong bonding was studied by observing copper transferred by various PDMS curing conditions, including the standard condition. The condition creating the strong bonding was baking PDMS (5:1 = base polymer: curing agent) at 150 °C for 20 min. Experimentation showed that the optimum thickness of the transferred metal shows that the optimum thickness is approximately 500 nm, which allows for a higher resistance to stresses. The successful transfer of copper, nickel and silver layers onto PDMS with a stronger adhesion force opens up many new applications dealing with the fabrication of flexible electrodes, sensors, and flexible soft magnets.
聚二甲基硅氧烷(PDMS)是一种柔性且具有生物相容性的材料,广泛应用于微流控器件的制造,并且常被用于柔性电极的制造研究。使用PDMS制造柔性电极最常用的方法是将金属电极转移到所述PDMS上。然而,转移过程困难,并且由于金属与PDMS之间固有的弱粘附力,转移的金属层很容易受损,因此需要在两者之间进行化学处理或设置牺牲层。使用化学处理或牺牲层的制造工艺复杂且昂贵,这是在柔性电极制造中使用PDMS的主要限制。本文讨论了一种可能的解决方案的研究结果,即使用无化学物质的金属与PDMS热键合技术在PDMS与各种金属(铜、镍和银)之间形成强键合。此方法与PDMS固化过程相同,但固化条件有所不同。通过观察在包括标准条件在内的各种PDMS固化条件下转移的铜,研究了形成强键合所需的条件。形成强键合的条件是将PDMS(基础聚合物:固化剂 = 5:1)在150°C下烘烤20分钟。实验表明,转移金属的最佳厚度表明最佳厚度约为500nm,这使得其具有更高的抗应力能力。铜、镍和银层以更强的粘附力成功转移到PDMS上,为柔性电极、传感器和柔性软磁体的制造开辟了许多新的应用。