Ma Ke-Ping, Wu Chao-Wei, Hsieh Tso-Sheng, Hsieh Min-Yuan, Chiang Chia-Chin
Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 807, Taiwan.
Micromachines (Basel). 2016 Jul 26;7(8):129. doi: 10.3390/mi7080129.
This paper proposes an optical fiber strain sensor based on packaged long-period fiber gratings (PLPFG) which is fabricated by the micro-electromechanical systems (MEMS) process and packaged with poly-dimethylsiloxane (PDMS) polymer materials. The optical fiber sensor packaged with PDMS improves robustness effectively. The proposed PLPFG sensors have periods of 610, 650, 660 μm and fiber diameter of 48, 60, 72 μm, respectively. The resonance dip of the PLPFG grows when a strain loaded onto the sensor. The results show that the largest strain sensitivity of the PLPFG strain sensor was -0.0652 dB/με from 0⁻1200 με and the linearity (²) was 0.9812. Accordingly, the proposed PLPFG sensor has good potential for high-sensitivity strain sensing applications.
本文提出了一种基于封装长周期光纤光栅(PLPFG)的光纤应变传感器,该传感器采用微机电系统(MEMS)工艺制造,并用聚二甲基硅氧烷(PDMS)聚合物材料进行封装。用PDMS封装的光纤传感器有效提高了鲁棒性。所提出的PLPFG传感器的周期分别为610、650、660μm,光纤直径分别为48、60、72μm。当传感器受到应变时,PLPFG的共振凹陷会增大。结果表明,PLPFG应变传感器在0⁻1200με范围内的最大应变灵敏度为-0.0652dB/με,线性度(²)为0.9812。因此,所提出的PLPFG传感器在高灵敏度应变传感应用中具有良好的潜力。