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基于周期性 SU8 厚胶光刻技术的夹心型长周期光纤光栅滤波器。

Sandwiched long-period fiber grating filter based on periodic SU8-thick photoresist technique.

机构信息

Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, 415 Chien Kung Road, Kaohsiung 807, Taiwan.

出版信息

Opt Lett. 2009 Dec 1;34(23):3677-9. doi: 10.1364/OL.34.003677.

Abstract

A loss-tunable sandwiched long-period fiber grating (SLPFG) filter is proposed in this Letter. This SLPFG utilized thick SU8 photoresist layers to induce refractive index modulations, and ultrahigh period precision was hence achieved. The external force required to tune this SLPFG filter is about 0.3942 N with the deepest loss attenuation 31.29 dB at 1534 nm wavelength. This process not only improves the overall performance of traditional long period fiber grating but also cuts down the facility cost by 50%. The proposed SLPFG has great potential for low-cost and compact force transducer applications.

摘要

本文提出了一种损耗可调的夹心长周期光纤光栅(SLPFG)滤波器。该 SLPFG 利用厚 SU8 光刻胶层来诱导折射率调制,从而实现超高周期精度。调节这种 SLPFG 滤波器所需的外力约为 0.3942N,在 1534nm 波长处的损耗衰减最深可达 31.29dB。这一过程不仅提高了传统长周期光纤光栅的整体性能,还降低了 50%的设备成本。所提出的 SLPFG 具有低成本和紧凑力传感器应用的巨大潜力。

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