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集成平面电磁致动器的可变焦距液体透镜

Variable-Focus Liquid Lens Integrated with a Planar Electromagnetic Actuator.

作者信息

Wang Liang, Duan Junping, Zhang Binzhen, Wang Wanjun

机构信息

Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China.

School of Instrument and Electronics, North University of China, Taiyuan 030051, China.

出版信息

Micromachines (Basel). 2016 Oct 17;7(10):190. doi: 10.3390/mi7100190.

DOI:10.3390/mi7100190
PMID:30404362
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6190286/
Abstract

In this paper, we design, fabricate and characterize a new electromagnetically actuated variable-focus liquid lens which consists of two polymethyl methacrylate (PMMA) substrates, a SU-8 substrate, a polydimethylsiloxane (PDMS) membrane, a permanent magnet and a planar electromagnetic actuator. The performance of this liquid lens is tested from four aspects including surface profiling, optical observation, variation of focal length and dynamic response speed. The results shows that with increasing current, the optical chamber PDMS membrane bulges up into a shape with a smaller radius of curvature, and the picture recorded by a charge-coupled device (CCD) camera through the liquid lens also gradually becomes blurred. As the current changes from -1 to 1.2 A, the whole measured focal length of the proposed liquid lens ranges from -133 to -390 mm and from 389 to 61 mm. Then a 0.8 A square-wave current is applied to the electrode, and the actuation time and relaxation time are 340 and 460 ms, respectively. The liquid lens proposed in the paper is easily integrated with microfluidic chips and medical detecting instruments due to its planar structure.

摘要

在本文中,我们设计、制造并表征了一种新型电磁驱动可变焦距液体透镜,它由两个聚甲基丙烯酸甲酯(PMMA)基板、一个SU-8基板、一个聚二甲基硅氧烷(PDMS)膜、一个永磁体和一个平面电磁致动器组成。从表面轮廓分析、光学观察、焦距变化和动态响应速度四个方面对该液体透镜的性能进行了测试。结果表明,随着电流增加,光学腔室的PDMS膜鼓起形成曲率半径更小的形状,电荷耦合器件(CCD)相机通过液体透镜记录的图像也逐渐变得模糊。当电流从-1 A变化到1.2 A时,所提出的液体透镜的整个测量焦距范围从-133 mm到-390 mm以及从389 mm到61 mm。然后将0.8 A的方波电流施加到电极上,驱动时间和弛豫时间分别为340 ms和460 ms。本文所提出的液体透镜由于其平面结构,易于与微流控芯片和医学检测仪器集成。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/3065fe922c5b/micromachines-07-00190-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/5bac810ee1d4/micromachines-07-00190-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/f6e1913ef386/micromachines-07-00190-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/ad8042ee9aa3/micromachines-07-00190-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/fc09f14fd9ea/micromachines-07-00190-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/b265c97972c3/micromachines-07-00190-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/524fa21d323c/micromachines-07-00190-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/7d733d5383ec/micromachines-07-00190-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/3065fe922c5b/micromachines-07-00190-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/5bac810ee1d4/micromachines-07-00190-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/f6e1913ef386/micromachines-07-00190-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/ad8042ee9aa3/micromachines-07-00190-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/fc09f14fd9ea/micromachines-07-00190-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/b265c97972c3/micromachines-07-00190-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/524fa21d323c/micromachines-07-00190-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/7d733d5383ec/micromachines-07-00190-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27a0/6190286/3065fe922c5b/micromachines-07-00190-g008.jpg

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本文引用的文献

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Annular folded electrowetting liquid lens.环形折叠式电润湿液体透镜。
Opt Lett. 2015 May 1;40(9):1968-71. doi: 10.1364/OL.40.001968.
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Fabrication and Characterization of Flexible Electrowetting on Dielectrics (EWOD) Microlens.柔性介质上电润湿(EWOD)微透镜的制造与表征
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