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嵌段共聚物定向自组装中进入刷涂表面的渗透性的作用。

Role of Penetrability into a Brush-Coated Surface in Directed Self-Assembly of Block Copolymers.

作者信息

Evangelio Laura, Fernández-Regúlez Marta, Fraxedas Jordi, Müller Marcus, Pérez-Murano Francesc

机构信息

Institute of Microelectronics of Barcelona (IMB-CNM, CSIC) , Campus de la UAB , 08193 , Bellaterra , Spain.

Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST , Campus UAB, Bellaterra 08193 Barcelona , Spain.

出版信息

ACS Appl Mater Interfaces. 2019 Jan 23;11(3):3571-3581. doi: 10.1021/acsami.8b19062. Epub 2019 Jan 11.

Abstract

High-density and high-resolution line and space patterns on surfaces are obtained by directed self-assembly of lamella-forming block copolymers (BCPs) using wide-stripe chemical guiding patterns. When the width of the chemical pattern is larger than the half-pitch of the BCP, the interaction energy between each BCP domain and the surface is crucial to obtain the desired segregated film morphology. We investigate how the intermixing between BCPs and polymer brush molecules on the surface influences the optimal surface and interface free energies to obtain a proper BCP alignment. We have found that computational models successfully predict the experimentally obtained guided patterns if the penetrability of the brush layer is taken into account instead of a hard, impenetrable surface. Experiments on directed self-assembly of lamella-forming poly(styrene- block-methyl methacrylate) using chemical guiding patterns corroborate the models used in the simulations, where the values of the surface free energy between the BCP and the guiding and background stripes are accurately determined using an experimental method based on the characterization of contact angles in droplets formed after dewetting of homopolymer blends.

摘要

通过使用宽条纹化学引导图案对形成片层的嵌段共聚物(BCP)进行定向自组装,可在表面获得高密度和高分辨率的线和间距图案。当化学图案的宽度大于BCP的半间距时,每个BCP域与表面之间的相互作用能对于获得所需的分离膜形态至关重要。我们研究了表面上BCP与聚合物刷分子之间的混合如何影响最佳表面和界面自由能,以实现适当的BCP排列。我们发现,如果考虑刷层的渗透性而不是坚硬、不可渗透的表面,计算模型就能成功预测实验获得的引导图案。使用化学引导图案对形成片层的聚(苯乙烯-嵌段-甲基丙烯酸甲酯)进行定向自组装的实验证实了模拟中使用的模型,其中基于对均聚物共混物去湿后形成的液滴中的接触角进行表征的实验方法,准确测定了BCP与引导条纹和背景条纹之间的表面自由能值。

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