Characterization of microresonator-geometry-deformation for cavity optomechanics.

We have studied the effect of geometry deformation on the mechanical frequencies and quality factors for different modes in the Whispering Gallery Mode (WGM) microresonators, that is unavoidable in the practical fabrication. The subsidence of the sphere and a more general condition with fewer symmetries and complex deformation of eccentricity, subsidence, and offset are first modeled in this paper, which could tune the mechanical frequency in a much wider spectral range than the pillar-diameter-induced perturbation. we also show that the mechanical quality factors for the non-whispering-gallery mechanical mode could be increased in the order of 4 magnitudes at a specific subsidence, and form a mechanical bound state in the continuum (BIC) which is induced by the symmetry breaking and reveals new mechanisms to confine radiation. A much broader BIC window width with higher mechanical quality factor could be achieved, which is of great importance in both fundamental research and scientific applications.