Li Duo, Wang Bo, Qiao Zheng, Jiang Xiangqian
Opt Express. 2019 Jan 7;27(1):212-224. doi: 10.1364/OE.27.000212.
Microlens arrays (MLAs) are increasingly applied in high-end photonics and imaging systems. Advanced diamond turning machining with tool servo technique is a superior method of fabricating micro-structured arrays with sub-micrometer form accuracy and nanometer surface finish. This paper proposes an innovative framework for ultraprecision machining of MLA. The established metrology-integrated machining platform consists of a 3-axis ultraprecision turning machine and a nanometric interferometric probe. On-machine surface measurement enables the in situ inspection and characterization of MLA features while preserving the consistency between the machining and measurement coordinate. The dedicated surface error characterization method and 3D corrective machining strategy are also presented. An experimental study is carried out in order to prove the proposed MLA characterization's and 3D corrective machining's effectiveness in improving the MLA surface accuracy.
微透镜阵列（MLA）在高端光子学和成像系统中的应用越来越广泛。采用刀具伺服技术的先进金刚石车削加工是制造具有亚微米形状精度和纳米表面光洁度的微结构阵列的一种优越方法。本文提出了一种用于微透镜阵列超精密加工的创新框架。所建立的计量集成加工平台由一台三轴超精密车床和一个纳米干涉测量探头组成。在位表面测量能够在保持加工和测量坐标一致性的同时，对微透镜阵列特征进行原位检测和表征。还提出了专用的表面误差表征方法和三维校正加工策略。为了证明所提出的微透镜阵列表征和三维校正加工在提高微透镜阵列表面精度方面的有效性，进行了一项实验研究。
