Zhao Libo, Luo Yunyun, Huang Xiangxiang, Zhou Xiangyang, -Hebibul Rahman, Ding Jianjun, Li Zhikang, Jiang Zhuangde
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China.
School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China.
Rev Sci Instrum. 2019 Jan;90(1):015002. doi: 10.1063/1.5053835.
A novel microsensor has been designed for the measurement of thermal conductivity of fluids based on the three omega (3ω) method. First, we theoretically analyzed the heat conduction using the 3ω method to demonstrate the mechanism of the microsensor to measure the thermal conductivity of a fluid. For the main structure of the microsensor, a heater was supported by the thin dielectric layers. In order to obtain the optimal parameters, we used the finite element method to simulate the working condition of the microsensor. In the simulation model, the effects of the thicknesses of the heater and dielectric layers on the thermal conductivity λ of the fluid were analyzed. The simulation results confirmed the validity and accuracy of conventional analytical calculations. Based on the simulation and theoretical calculation, a microsensor was optimally designed and fabricated to measure the thermal conductivity of fluids. Experimental data are consistent with those reported in the literature and demonstrate that the proposed sensor is effective for measuring thermal conductivity of fluids, including conductive ones.
一种基于三ω（3ω）法的新型微传感器被设计用于测量流体的热导率。首先，我们使用3ω法对热传导进行了理论分析，以证明微传感器测量流体热导率的机制。对于微传感器的主要结构，加热器由薄介电层支撑。为了获得最佳参数，我们使用有限元方法模拟微传感器的工作条件。在模拟模型中，分析了加热器和介电层厚度对流体热导率λ的影响。模拟结果证实了传统分析计算的有效性和准确性。基于模拟和理论计算，优化设计并制造了一个微传感器来测量流体的热导率。实验数据与文献报道的数据一致，表明所提出的传感器对于测量包括导电流体在内的流体热导率是有效的。
