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基于悬浮功能化碳纳米管的低滞后和快速响应时间湿度传感器。

Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes.

机构信息

Department of Electrical Engineering, École de Technologie Supérieure, Montreal, QC H3C 1K3, Canada.

出版信息

Sensors (Basel). 2019 Feb 7;19(3):680. doi: 10.3390/s19030680.

DOI:10.3390/s19030680
PMID:30736455
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6386924/
Abstract

A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture.

摘要

采用低温表面微加工工艺制作了一种使用悬空碳纳米管（CNT）的湿度传感器。CNT 经羧基功能化，促进了水蒸气与 CNT 的相互作用。该湿度传感器的响应时间为 12s，恢复时间为 47s，具有优异的迟滞性和稳定性能。悬空结构的迟滞曲线面积为 3.6，相较于非悬空结构减少了 3.2 倍。悬空结构和非悬空结构器件的对比研究突出了使用悬空结构的优势。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/6f48f211d882/sensors-19-00680-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/46539567b60b/sensors-19-00680-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/c37db8b10875/sensors-19-00680-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/175605cc6ad6/sensors-19-00680-g003a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/2a6d29af32f2/sensors-19-00680-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/b994d16f2258/sensors-19-00680-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/bff355bcdad5/sensors-19-00680-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/6f48f211d882/sensors-19-00680-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/46539567b60b/sensors-19-00680-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/c37db8b10875/sensors-19-00680-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/175605cc6ad6/sensors-19-00680-g003a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/2a6d29af32f2/sensors-19-00680-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/b994d16f2258/sensors-19-00680-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/bff355bcdad5/sensors-19-00680-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc6a/6386924/6f48f211d882/sensors-19-00680-g007.jpg

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