基于悬浮功能化碳纳米管的低滞后和快速响应时间湿度传感器。

Department of Electrical Engineering, École de Technologie Supérieure, Montreal, QC H3C 1K3, Canada.

Sensors (Basel). 2019 Feb 7;19(3):680. doi: 10.3390/s19030680.

A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture.

采用低温表面微加工工艺制作了一种使用悬空碳纳米管（CNT）的湿度传感器。CNT 经羧基功能化，促进了水蒸气与 CNT 的相互作用。该湿度传感器的响应时间为 12s，恢复时间为 47s，具有优异的迟滞性和稳定性能。悬空结构的迟滞曲线面积为 3.6，相较于非悬空结构减少了 3.2 倍。悬空结构和非悬空结构器件的对比研究突出了使用悬空结构的优势。