Liu Yan Jun, Shi Jinjie, Zhang Fan, Liang Huinan, Xu Jian, Lakhtakia Akhlesh, Fonash Stephen J, Huang Tony Jun
Department of Engineering Science and Mechanics, Pennsylvania State University, University Park, PA 16802, USA.
Sens Actuators B Chem. 2011 Aug;156(2):593-598. doi: 10.1016/j.snb.2011.02.003. Epub 2011 Feb 12.
A high-speed humidity sensor based on a nanostructured chiral sculptured thin film (CSTF) was fabricated and tested. The sensing principle is based on the shift of the central wavelength of the circular Bragg regime of the CSTF caused by adsorption and desorption of water vapor in the void regions of the CSTF. Spectral changes due to varying relative-humidity (RH) levels in the ambient environment were measured by a spectrometer. The CSTF sensor exhibited excellent reversibility and reproducibility from 40% to 100% RH. Moreover, the adsorption time of the sensor was measured to be as low as ∼140 ms, making it promising for many high-speed humidity-sensing applications.
制备并测试了一种基于纳米结构手性雕刻薄膜（CSTF）的高速湿度传感器。其传感原理基于CSTF圆形布拉格区域中心波长的移动，该移动由CSTF空隙区域中水蒸气的吸附和解吸引起。用光谱仪测量了环境中相对湿度（RH）水平变化导致的光谱变化。CSTF传感器在40%至100%RH范围内表现出优异的可逆性和可重复性。此外，测得该传感器的吸附时间低至约140毫秒，这使其在许多高速湿度传感应用中具有前景。
