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集成在纳米图案化Si(100)上的相变立方氮化镓的高内量子效率紫外发射。

High Internal Quantum Efficiency Ultraviolet Emission from Phase-Transition Cubic GaN Integrated on Nanopatterned Si(100).

作者信息

Liu Richard, Schaller Richard, Chen Chang Qiang, Bayram Can

机构信息

Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, United States.

Micro and Nanotechnology Technology Laboratory, Urbana, Illinois 61801, United States.

出版信息

ACS Photonics. 2018;5(3):955-963. doi: 10.1021/acsphotonics.7b01231. Epub 2018 Jan 8.

Abstract

Ultraviolet emission characteristics of cubic (c-) GaN enabled through hexagonal-to-cubic phase transition are reported. Substrate patterning and material growth are shown to affect phase purity and emission characteristics of c-GaN as studied by electron backscatter diffraction, and photo- and cathodoluminescence, respectively. Raman study shows a tensile strain in the c-GaN. Time-resolved photoluminescence reveals c-GaN band edge emission decay time of 11 ps. The ultraviolet emissions from both phases of GaN are linearly polarized in the same direction, which is along the ⟨112̅0⟩ and ⟨110⟩ directions of hexagonal GaN and c-GaN, respectively. Temperature-dependent (5.7 to 280 K) cathodoluminescence studies reveal an internal quantum efficiency of ~29% at room temperature along with intrinsic and extrinsic defect energy levels of ~124 and ~344 meV, respectively, of the phase-transition c-GaN. Using the IQE value and carrier decay lifetime, a radiative lifetime of 38 ps is extracted. Overall, photonic properties of phase-transition c-GaN and their dependence on substrate patterning and material growth are reported.

摘要

报道了通过六方相向立方相转变实现的立方(c-)GaN的紫外发射特性。通过电子背散射衍射、光致发光和阴极发光研究表明,衬底图案化和材料生长分别会影响c-GaN的相纯度和发射特性。拉曼研究表明c-GaN中存在拉伸应变。时间分辨光致发光显示c-GaN带边发射衰减时间为11 ps。GaN两个相的紫外发射在相同方向上呈线性偏振,分别沿着六方GaN和c-GaN的〈112̅0〉和〈110〉方向。温度依赖(5.7至280 K)的阴极发光研究表明,室温下相变c-GaN的内量子效率约为29%,本征和非本征缺陷能级分别约为124和344 meV。利用内量子效率值和载流子衰减寿命,提取出辐射寿命为38 ps。总体而言,报道了相变c-GaN的光子特性及其对衬底图案化和材料生长的依赖性。

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