Low-voltage wide-field-of-view lidar scanning system based on a MEMS mirror.

Lidar has been widely used in many fields, such as autopilots and target detection. However, commonly used lidar with a rotary mechanical structure has difficulty achieving high vertical resolution. Some lidars with micro-electro-mechanical-system (MEMS) union are driven by high voltage and cannot uniformly scan at a large scan angle. This paper proposes a uniform scanning system in wide field of view (FOV) based on a MEMS mirror for 3D imaging lidar. We use a dual-axis electromagnetic-driving MEMS mirror, which can be used for arbitrary-direction optical beam steering with a low operating voltage. We design a uniform angle scanning system and set up the scanning system to analyze the scan angle, spot size, and luminous flux on the target plane. The experimental results show that this system can scan uniformly within a large FOV with a small spot size, at a target plane 100 m away.