Zhou Jingkun, Qian Keyuan
Appl Opt. 2019 Feb 10;58(5):A283-A290. doi: 10.1364/AO.58.00A283.
Lidar has been widely used in many fields, such as autopilots and target detection. However, commonly used lidar with a rotary mechanical structure has difficulty achieving high vertical resolution. Some lidars with micro-electro-mechanical-system (MEMS) union are driven by high voltage and cannot uniformly scan at a large scan angle. This paper proposes a uniform scanning system in wide field of view (FOV) based on a MEMS mirror for 3D imaging lidar. We use a dual-axis electromagnetic-driving MEMS mirror, which can be used for arbitrary-direction optical beam steering with a low operating voltage. We design a uniform angle scanning system and set up the scanning system to analyze the scan angle, spot size, and luminous flux on the target plane. The experimental results show that this system can scan uniformly within a large FOV with a small spot size, at a target plane 100 m away.
激光雷达已广泛应用于许多领域，如自动驾驶和目标检测。然而，常用的具有旋转机械结构的激光雷达难以实现高垂直分辨率。一些带有微机电系统（MEMS）组件的激光雷达由高电压驱动，无法在大扫描角度下进行均匀扫描。本文提出了一种基于MEMS镜的用于三维成像激光雷达的宽视场（FOV）均匀扫描系统。我们使用双轴电磁驱动MEMS镜，其可在低工作电压下用于任意方向的光束转向。我们设计了一个均匀角度扫描系统，并搭建了扫描系统来分析扫描角度、光斑尺寸和目标平面上的光通量。实验结果表明，该系统能够在100米外的目标平面上以小光斑尺寸在大视场内进行均匀扫描。
