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基于扫描 MEMS 镜的高角分辨率 360°激光雷达的发展。

Development of the high angular resolution 360° LiDAR based on scanning MEMS mirror.

机构信息

Department of Mechanical Engineering, The City University of Hong Kong, Kowloon Tong, Hong Kong, China.

GenHigh Tech Co., Limited, Nan Shan District, Shen Zhen, China.

出版信息

Sci Rep. 2023 Jan 27;13(1):1540. doi: 10.1038/s41598-022-26394-6.

DOI:10.1038/s41598-022-26394-6
PMID:36707630
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9883477/
Abstract

Light detection and ranging (LiDAR) using various operational principles has been applied in many fields, e.g., robotics navigation, autonomous vehicles, unmanned aerial flyers, land surveying, etc. The multichannel LiDAR system is of great importance in the field of autonomous driving due to its larger field of view (FoV). However, the number of transceivers limits the vertical angular resolution of multichannel LiDAR systems and makes them costly. On the other hand, the emergence of microelectromechanical systems (MEMS) mirrors may provide a highly promising solution to a low-cost, high angular resolution LiDAR system. We have demonstrated a MEMS mirror-based 360° LiDAR system with high angular resolution and will present the detailed design process and obtained experimental results in this paper. With the combination of the MEMS mirror and a rotation platform for the LiDAR system, a 360° × 8.6° (horizontal × vertical) FoV was achieved. Compared with existing commercial multichannel 360° LiDAR systems, our system has 13.8 times better angular resolution than the Velodyne HDL-64 LiDAR sensor. The experimental results verified an excellent performance of 0.07° × 0.027° (horizontal × vertical) angular resolution, which enhances the panoramic scanning and imaging capability of the LiDAR system, potentially providing more accurate 3D scanning applications in areas such as autonomous vehicles, indoor surveying, indoor robotics navigation, etc.

摘要

激光雷达（LiDAR）利用各种工作原理已应用于许多领域，例如机器人导航、自动驾驶汽车、无人机、陆地测量等。多通道 LiDAR 系统在自动驾驶领域非常重要，因为它具有更大的视野（FoV）。然而，收发器的数量限制了多通道 LiDAR 系统的垂直角分辨率，使其成本高昂。另一方面，微机电系统（MEMS）反射镜的出现可能为低成本、高角分辨率 LiDAR 系统提供了极具前景的解决方案。我们已经展示了一种基于 MEMS 反射镜的 360° LiDAR 系统，具有高角分辨率，并将在本文中介绍详细的设计过程和获得的实验结果。通过将 MEMS 反射镜与 LiDAR 系统的旋转平台相结合，实现了 360°×8.6°（水平×垂直）的 FoV。与现有的商用多通道 360°LiDAR 系统相比，我们的系统的角分辨率比 Velodyne HDL-64 LiDAR 传感器提高了 13.8 倍。实验结果验证了 0.07°×0.027°（水平×垂直）的出色角分辨率性能，增强了 LiDAR 系统的全景扫描和成像能力，有望在自动驾驶汽车、室内测量、室内机器人导航等领域提供更精确的 3D 扫描应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/0d53d8167a48/41598_2022_26394_Fig10_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/1b857ea38551/41598_2022_26394_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/3014e97e8f20/41598_2022_26394_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/731870b7e39f/41598_2022_26394_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/9033198c2d6d/41598_2022_26394_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/bf6f7ede9108/41598_2022_26394_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/507a3a2b9245/41598_2022_26394_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/ac914c5f3f59/41598_2022_26394_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/9d1529a4cf14/41598_2022_26394_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/456b1496f2c9/41598_2022_26394_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/0d53d8167a48/41598_2022_26394_Fig10_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/1b857ea38551/41598_2022_26394_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/3014e97e8f20/41598_2022_26394_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/731870b7e39f/41598_2022_26394_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/9033198c2d6d/41598_2022_26394_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/bf6f7ede9108/41598_2022_26394_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/507a3a2b9245/41598_2022_26394_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/ac914c5f3f59/41598_2022_26394_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/9d1529a4cf14/41598_2022_26394_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/456b1496f2c9/41598_2022_26394_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651e/9883477/0d53d8167a48/41598_2022_26394_Fig10_HTML.jpg

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A two-dimensional laser scanning mirror using motion-decoupling electromagnetic actuators.使用运动解耦电磁驱动器的二维激光扫描镜。
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Design and characterization of a 256 x 64-pixel single-photon imager in CMOS for a MEMS-based laser scanning time-of-flight sensor.基于微机电系统（MEMS）的激光扫描飞行时间传感器中用于互补金属氧化物半导体（CMOS）的256×64像素单光子成像器的设计与特性分析
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