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刀具刃口波纹度对金刚石车削光学元件衍射效应的影响:理论模拟与实验验证

Influence of tool edge waviness on the diffraction effect of diamond-turned optics: theoretical simulation and experimental validation.

作者信息

He C L, Wang S J, Zong W J, Zhang S T

出版信息

Appl Opt. 2019 Feb 20;58(6):1596-1605. doi: 10.1364/AO.58.001596.

Abstract

In this work, the influence of tool edge waviness on the diffraction effect of diamond-turned optics is simulated theoretically and further validated experimentally. In simulation, a 3D surface topography model with consideration of the influence of tool edge waviness is established, in which the variation of tool edge profile is estimated by a linear model in relation to the cutting distance. The results show that the diffraction effect represented in simulation is consistent with the experimental observation. With the deterioration of tool edge waviness, the diffraction efficiency of the specular light decreases, but the high-order diffracted light intensively distributes in the horizontal direction on the receiving screen. Such observation can be attributed to the subgrating effect induced by the periodic duplication of the tool edge profile on the machined surface, which heavily depends on the deterioration of tool edge waviness. Finally, a waviness-controlled diamond tool is recommended to finish a diffraction-free optics by the diamond turning process. Moreover, the diffraction effect can also be employed to monitor the dynamic wear of the cutting tool in diamond turning.

摘要

在这项工作中,从理论上模拟了刀具刃口波纹度对金刚石车削光学元件衍射效应的影响,并通过实验进一步验证。在模拟中,建立了考虑刀具刃口波纹度影响的三维表面形貌模型,其中刀具刃口轮廓的变化通过与切削距离相关的线性模型进行估算。结果表明,模拟中表现出的衍射效应与实验观察结果一致。随着刀具刃口波纹度的恶化,镜面光的衍射效率降低,但高阶衍射光在接收屏幕上沿水平方向密集分布。这种现象可归因于加工表面上刀具刃口轮廓的周期性重复所引起的亚光栅效应,该效应在很大程度上取决于刀具刃口波纹度的恶化。最后,推荐使用波纹度可控的金刚石刀具通过金刚石车削工艺加工出无衍射的光学元件。此外,衍射效应还可用于监测金刚石车削中刀具的动态磨损情况。

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