Waller Erik Hagen, Von Freymann Georg
Physics Department and Research Center OPTIMAS, University of Kaiserslautern, 67663 Kaiserslautern, Germany.
Fraunhofer-Institute for Physical Measurement Techniques (IPM), 67663 Kaiserslautern, Germany.
Polymers (Basel). 2016 Aug 10;8(8):297. doi: 10.3390/polym8080297.
One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity-the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect.
高分辨率微打印的主要挑战之一是在紧邻位置写入的特征之间的串扰——邻近效应。例如，这种效应会阻止周期低于几百纳米的光栅形成。令人惊讶的是，这种效应在空间和时间上的依赖性尚未得到充分研究。在此，我们提出一种基于空间光调制器的方法，用于动态测量在微打印典型的长度和时间尺度上邻近效应的强度。在各种光刻胶中比较邻近强度。结果表明，分子扩散对邻近效应有很大贡献。
