一种通过氙等离子体聚焦离子束制备原子探针层析成像样品的原位方法。
An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focussed ion beam.
作者信息
Halpin J E, Webster R W H, Gardner H, Moody M P, Bagot P A J, MacLaren D A
机构信息
SUPA, School of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ, UK.
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK.
出版信息
Ultramicroscopy. 2019 Jul;202:121-127. doi: 10.1016/j.ultramic.2019.04.005. Epub 2019 Apr 12.
A method for the rapid preparation of atom probe tomography (APT) needles using a xenon plasma-focussed ion beam (FIB) instrument is presented and demonstrated on a test sample of Ti-6Al-4V alloy. The method requires significantly less operator input than the standard lift-out protocol, is site-specific and produces needles with minimal ion-beam damage; electron microscopy indicated the needle's surface amorphised/oxidised region to be less than 2 nm thick. The resulting needles were routinely analysable by APT, confirming the expected microstructure and showing negligible Xe contamination.
介绍了一种使用氙等离子体聚焦离子束（FIB）仪器快速制备原子探针层析成像（APT）针的方法，并在Ti-6Al-4V合金测试样品上进行了演示。与标准的取出协议相比，该方法所需的操作员输入显著减少，具有位点特异性，并且产生的针具有最小的离子束损伤；电子显微镜显示针的表面非晶化/氧化区域厚度小于2纳米。所得的针常规可通过APT进行分析，证实了预期的微观结构，并且显示出可忽略不计的Xe污染。
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