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基于抛物面参数化的用于高离轴非球面的环形子孔径干涉测量法。

Annular subaperture interferometry for high-departure aspheres using paraboloidal parameterization.

作者信息

Nowicki Keith, Wagner Kelvin

出版信息

Appl Opt. 2019 Apr 20;58(12):3282-3292. doi: 10.1364/AO.58.003282.

Abstract

A low-cost technique is presented for constructing stitched Fizeau interferometric measurements of high-spherical-departure concave aspheres of arbitrary conic constant without the use of null optics. The optical test configuration assembles the surface figure of the asphere using subapertures parameterized as variances from best-fit paraboloids. Subtracting the optical path difference between each idealized paraboloid and the corresponding annulus of measured data removes the annular wavefront aberrations without the need to fit Zernike polynomials. The proof-of-concept measurement and reconstruction of a 250 mm diameter diamond-turned ellipsoidal mirror with more than 3000 waves of spherical departure are reported. The presented technique is an inexpensive addition to the array of tools used to measure large-aperture aspheres and high-departure freeform optics.

摘要

本文提出了一种低成本技术,用于在不使用零位光学元件的情况下,对任意二次常数的高球面度凹非球面进行拼接斐索干涉测量。光学测试配置使用参数化为与最佳拟合抛物面偏差的子孔径来组装非球面的表面形状。减去每个理想化抛物面与相应测量数据环带之间的光程差,无需拟合泽尼克多项式即可消除环形波前像差。报道了对直径250毫米、球面度超过3000波的金刚石车削椭球面镜进行的概念验证测量和重建。所提出的技术是用于测量大口径非球面和高偏差自由曲面光学元件的一系列工具中的一种低成本补充。

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