Zhao Wenping, Jia Hongbao, Wang Ying, Wang Qian, Wu Henan, Wang Biao
Appl Opt. 2019 Mar 20;58(9):2385-2392. doi: 10.1364/AO.58.002385.
Five-layer antireflective coating for the visible and the infrared has been successfully fabricated by a solgel route on quartz substrate. The quarter-half-quarter multilayer structure with two buffer layers is optimized by the optical admittance approach. Mesoporous SiO film templated by an ethylene oxide-propylene oxide-ethylene oxide triblock copolymer is used as the top layer, and SiO-TiO hybrid films are employed as the other layers. The grazing incidence small-angle x-ray scattering results indicate the ordered mesopores in the low-index SiO film, as well as the homogeneity of the SiO-TiO hybrid films. Transmittance spectra are fitted to obtain film thicknesses and refractive indices, providing the main technological parameters for theory designs. A short heat-treatment step followed by a shock cooling process is introduced to suppress crack formation in film stacks. The transmittance of the obtained five-layer antireflective coating exceeds 99% at 500-700 nm, and the maximum value in the infrared region is 97.84% at 1100 nm. This work is a beneficial attempt to fabricate antireflective coatings with multilayer structure through the soft solgel route.
通过溶胶 - 凝胶法在石英衬底上成功制备了用于可见光和红外光的五层减反射涂层。采用光学导纳方法优化了具有两个缓冲层的四分之一 - 二分之一 - 四分之一多层结构。以环氧乙烷 - 环氧丙烷 - 环氧乙烷三嵌段共聚物为模板的介孔SiO薄膜用作顶层，SiO - TiO混合薄膜用作其他层。掠入射小角X射线散射结果表明低折射率SiO薄膜中存在有序介孔以及SiO - TiO混合薄膜的均匀性。通过拟合透过率光谱来获得薄膜厚度和折射率，为理论设计提供主要工艺参数。引入短时间热处理步骤后进行激冷工艺以抑制膜堆中的裂纹形成。所制备的五层减反射涂层在500 - 700nm处的透过率超过99%，在红外区域1100nm处的最大值为97.84%。这项工作是通过软溶胶 - 凝胶法制备具有多层结构减反射涂层的有益尝试。
