Li Jin, Liu Zilong
Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Optical Division, National Institute of Metrology, Beijing 100029, China.
Microsyst Nanoeng. 2017 Nov 6;3:17058. doi: 10.1038/micronano.2017.58. eCollection 2017.
The focal plane of a collimator used for the geometric calibration of an optical camera is a key element in the calibration process. The traditional focal plane of the collimator has only a single aperture light lead-in, resulting in a relatively unreliable calibration accuracy. Here we demonstrate a multi-aperture micro-electro-mechanical system (MEMS) light lead-in device that is located at the optical focal plane of the collimator used to calibrate the geometric distortion in cameras. Without additional volume or power consumption, the random errors of this calibration system are decreased by the multi-image matrix. With this new construction and a method for implementing the system, the reliability of high-accuracy calibration of optical cameras is guaranteed.
用于光学相机几何校准的准直仪焦平面是校准过程中的关键要素。传统准直仪的焦平面只有单个孔径光导入，导致校准精度相对不可靠。在此，我们展示了一种多孔径微机电系统（MEMS）光导入装置，其位于用于校准相机几何畸变的准直仪的光学焦平面处。在不增加体积或功耗的情况下，通过多图像矩阵降低了该校准系统的随机误差。通过这种新结构和实现该系统的方法，保证了光学相机高精度校准的可靠性。
