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使用微机械全光纤法布里-珀罗干涉应变计的高超声速气动力天平

Hypersonic Aerodynamic Force Balance Using Micromachined All-Fiber Fabry⁻Pérot Interferometric Strain Gauges.

作者信息

Qiu Huacheng, Min Fu, Yang Yanguang, Ran Zengling, Duan Jinxin

机构信息

China Aerodynamics Research and Development Center, Hypervelocity Aerodynamics Institute, Mianyang 621000, Sichuan Province, China.

University of Electronic Science and Technology of China, Key Lab of Optical Fiber Sensing and Communications, Chengdu 610000, Sichuan Province, China.

出版信息

Micromachines (Basel). 2019 May 11;10(5):316. doi: 10.3390/mi10050316.

Abstract

This paper presents high-sensitivity, micromachined all-fiber Fabry-Pérot interferometric (FFPI) strain gauges and their integration in a force balance for hypersonic aerodynamic measurements. The FFPI strain gauge has a short Fabry-Pérot cavity fabricated using an excimer laser etching process, and the deformation of the cavity is detected by a white-light optical phase demodulator. A three-component force balance, using the proposed FFPI gauges as sensing elements, was fabricated, calibrated, and experimentally evaluated. To reduce thermal output of the balance, a simple and effective self-temperature compensation solution, without external temperature sensors, is proposed and examined through both oven heating and wind tunnel runs. As a result of this approach, researchers are able to use the balance continuously throughout a wide range of temperatures. During preliminary testing in a hypersonic wind tunnel with a free stream Mach number of 12, the measurement accuracies of the balance were clearly improved after applying the temperature self-compensation.

摘要

本文介绍了高灵敏度的微机械全光纤法布里 - 珀罗干涉(FFPI)应变计及其在用于高超声速空气动力学测量的力平衡装置中的集成。FFPI应变计具有使用准分子激光蚀刻工艺制造的短法布里 - 珀罗腔,并且通过白光光学相位解调器检测腔的变形。制造了一个使用所提出的FFPI应变计作为传感元件的三分量力平衡装置,进行了校准并通过实验进行了评估。为了降低力平衡装置的热输出,提出了一种简单有效的无需外部温度传感器的自温度补偿解决方案,并通过烘箱加热和风洞试验进行了检验。采用这种方法的结果是,研究人员能够在很宽的温度范围内连续使用该力平衡装置。在自由流马赫数为12的高超声速风洞的初步测试中,应用温度自补偿后,力平衡装置的测量精度得到了明显提高。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca03/6562403/863f3ec75828/micromachines-10-00316-g001.jpg

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