Gardner J R, McGehee W R, McClelland J J
Nanoscale Device Characterization Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
J Appl Phys. 2019;125. doi: 10.1063/1.5085068.
Ion sources based on laser cooling have recently provided new pathways to high-resolution microscopy, ion milling, and ion implantation. Here, we present the design and detailed characterization of a Li magneto-optical trap ion source (MOTIS) with a peak brightness of (1.2 ± 0.2) × 10 A m sr eV and a maximum continuous current over 1 nA. These values significantly surpass previous Li MOTIS performance benchmarks. Using simple models, we discuss how the performance of this system relates to fundamental operating limits. This source will support a range of projects using lithium ion beams for surface microscopy and nanostructure characterization, including Li implantation for studies of ionic transport in energy storage materials.
基于激光冷却的离子源最近为高分辨率显微镜、离子铣削和离子注入提供了新途径。在此，我们展示了一种锂磁光阱离子源（MOTIS）的设计及详细特性，其峰值亮度为(1.2 ± 0.2) × 10 A m sr eV，最大连续电流超过1 nA。这些数值显著超越了之前锂MOTIS的性能基准。通过简单模型，我们讨论了该系统的性能与基本运行极限的关系。此离子源将支持一系列使用锂离子束进行表面显微镜和纳米结构表征的项目，包括用于研究储能材料中离子传输的锂注入。
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