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硅片上碳纳米管场发射电流的增强因子对电极尺寸的依赖性。

Dependence of enhancement factor on electrode size for field emission current from carbon nanotube on silicon wafer.

作者信息

Funayama Keita, Tanaka Hiroya, Hirotani Jun, Shimaoka Keiichi, Ohno Yutaka, Tadokoro Yukihiro

机构信息

Toyota Central Research & Development Laboratory, Inc., Nagakute 480-1192, Japan. Department of Electronics, Nagoya University, Nagoya 464-8603, Japan.

出版信息

Nanotechnology. 2019 Oct 18;30(42):425201. doi: 10.1088/1361-6528/ab33c8. Epub 2019 Jul 19.

DOI:10.1088/1361-6528/ab33c8
PMID:31323658
Abstract

This work studies the enhancement factor associated with a current emitted from a multi-wall carbon nanotube to an extremely small counter electrode. The experimental data show that the field enhancement factor increases by 1.15 times when the width of the counter electrode increases from 50 to 200 nm. To better understand this enhancement effect, field intensities at the emitter surface are numerically simulated. The experimental work and simulations demonstrate that the observed field enhancement results from increases in the capacitance between the emitter and counter electrode. In addition, corrugated counter electrodes are found to greatly affect both the capacitance and enhancement factor. This is because the corrugation of the anode surface raises the capacitance and thus provides a higher current. We experimentally show that an effective surface area enlargement of 1.67 times due to the corrugation provides a 1.06-fold increase of the enhancement factor. These results should assist in the future development of field emission devices based on semiconductor fabrication processes.

摘要

这项工作研究了与从多壁碳纳米管发射到极小对电极的电流相关的增强因子。实验数据表明,当对电极宽度从50纳米增加到200纳米时,场增强因子增加了1.15倍。为了更好地理解这种增强效应,对发射极表面的场强进行了数值模拟。实验工作和模拟表明,观察到的场增强是由于发射极和对电极之间电容的增加。此外,发现波纹状对电极对电容和增强因子都有很大影响。这是因为阳极表面的波纹增加了电容,从而提供了更高的电流。我们通过实验表明,由于波纹导致有效表面积扩大1.67倍,增强因子增加了1.06倍。这些结果应有助于基于半导体制造工艺的场发射器件的未来发展。

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