Gratuze Mathieu, Alameh Abdul Hafiz, Nabki Frederic
Department of Electrical Engineering, École de Technologie Supérieure, Montréal, QC H3C 1K3, Canada.
Sensors (Basel). 2019 Jul 24;19(15):3247. doi: 10.3390/s19153247.
With the rise of the Internet of Things (IoT) and the ever-increasing number of integrated sensors, the question of powering these devices represents an additional challenge. The traditional approach is to use a battery; however, harvesting energy from the environment seems to be the most practical approach. To that end, the use of piezoelectric MEMS energy has been proven as a potential power source in a wide range of applications. In this work, a proof of concept for a new architecture for MEMS energy harvesters is presented. The influence of the dimensions and different characteristics of these designs is discussed. These designs have been proven to be resilient to process variation thanks to their unique architecture. This work presents the use of vibration enhancement petals in order to widen the bandwidth of the energy harvester and provide a non-linear frequency response. The use of these vibration enhancement petals has allowed the fabrication of three design variations, each using an area of 1700 µm by 1700 µm. These designs have an operating bandwidth between 3.9 kHz and 14.5 kHz and can be scaled to achieve other targeted resonant frequencies.
随着物联网（IoT）的兴起以及集成传感器数量的不断增加，为这些设备供电的问题带来了额外的挑战。传统方法是使用电池；然而，从环境中获取能量似乎是最实际的方法。为此，压电微机电系统（MEMS）能量的使用已被证明是广泛应用中的一种潜在电源。在这项工作中，展示了一种用于MEMS能量收集器的新架构的概念验证。讨论了这些设计的尺寸和不同特性的影响。由于其独特的架构，这些设计已被证明对工艺变化具有弹性。这项工作提出了使用振动增强瓣来拓宽能量收集器的带宽并提供非线性频率响应。这些振动增强瓣的使用使得能够制造三种设计变体，每种变体使用的面积为1700 µm×1700 µm。这些设计的工作带宽在3.9 kHz至14.5 kHz之间，并且可以进行缩放以实现其他目标共振频率。
