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旋转填充床中 IC 芯片碳化过程中细颗粒的去除:建模与评估。

Removal of fine particles from IC chip carbonization process in a rotating packed bed: Modeling and assessment.

机构信息

Graduate Institute of Environmental Engineering, National Taiwan University, No. 71, Chou-Shan Road, Taipei City, 10673, Taiwan.

UWin Nanotech Company Limited. No. 3, Ln. 12, Yazhou Rd., Tucheng Dist., New Taipei City, 236, Taiwan.

出版信息

Chemosphere. 2020 Jan;238:124600. doi: 10.1016/j.chemosphere.2019.124600. Epub 2019 Aug 17.

DOI:10.1016/j.chemosphere.2019.124600
PMID:31446277
Abstract

A high-gravity rotating packed bed (HiGee RPB) is very efficient at removing pollution because it exerts a strong high centrifugal and allows tiny droplets to form, which allows the control of gaseous and particulate air pollution. In this study, fine particles that are removed from integrated circuit (IC) chip carbonization process using a RPB are evaluated under different high gravity factors and liquid-to-gas ratios. The greatest number of particles captured per energy consumption is 17.77 mg kWh in a RPB. This allow greater energy efficiency for the HiGee technology prevents an air-energy nexus. The maximum available particle removal efficiency for a RPB is determined using a response surface model (RSM). 99.5% of particles are removed at a high gravity factor of 262 and a liquid-to-gas ratio of 0.24. A semi-theoretical model is developed to determine the particle removal efficiency individually in packing and cavity zones of the RPB. More particles are removed in a cavity zone than in the packing zone as the high gravity factor increases. An empirical model shows that the particle removal efficiency depends on the operating factors. Finally, a comparison analysis of particulate matter treatment in various types of RPB is used to validate the performance in terms of particle removal using high-gravity technology for different industries.

摘要

高径比旋转填充床(HiGee RPB)在去除污染方面非常有效,因为它施加了强大的高离心力,并允许形成微小的液滴,从而可以控制气态和颗粒状空气污染。在这项研究中,使用 RPB 从集成电路(IC)芯片碳化过程中去除的细颗粒在不同的高重力因子和液气比下进行了评估。在 RPB 中,每消耗 17.77mg kWh 的能量捕获的颗粒数最多为 17.77mg kWh。这允许 HiGee 技术具有更高的能源效率,防止了空气能源的联系。使用响应面模型(RSM)确定了 RPB 的最大可用颗粒去除效率。在高重力因子为 262 和液气比为 0.24 的情况下,可去除 99.5%的颗粒。开发了一个半理论模型来单独确定 RPB 的填充区和腔区的颗粒去除效率。随着高重力因子的增加,腔区去除的颗粒比填充区多。经验模型表明,颗粒去除效率取决于操作因素。最后,对各种类型的 RPB 中颗粒物处理的比较分析用于根据不同行业的高重力技术的颗粒去除性能进行验证。

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