Wu Beibei, Yu Yu, Zhang Xinliang
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China.
Sci Rep. 2019 Sep 10;9(1):12946. doi: 10.1038/s41598-019-49380-x.
The increasing demands in consumer electronics markets have promoted the development of chip-scale optical gyroscopes. In this study, a mode-assisted on-chip silicon-on-insulator interferometric optical gyroscope is proposed and assessed. The proposed gyroscope uses two different spatial modes propagating oppositely in the sensing waveguide coil to form a fixed phase difference that ensures the system operating at the best sensitive point. Compared with conventional schemes, it avoids the phase modulator and the circulator, which are not easy to be integrated in the same platform. The simulated results show that the detectable angular rate reaches 0.64 deg/s with a footprint of 3.85 × 10 m. The experimental results validate the realization of the highly sensitive phase bias of the fabricated device.
消费电子市场不断增长的需求推动了芯片级光学陀螺仪的发展。在本研究中，提出并评估了一种模式辅助的片上绝缘体上硅干涉式光学陀螺仪。所提出的陀螺仪利用在传感波导线圈中反向传播的两种不同空间模式形成固定相位差，以确保系统在最佳敏感点运行。与传统方案相比，它避免了不易集成在同一平台上的相位调制器和环行器。模拟结果表明，在3.85×10平方米的占用面积下，可检测角速率达到0.64°/秒。实验结果验证了所制备器件高灵敏度相位偏置的实现。
