Egan Patrick F, Stone Jack A, Scherschligt Julia K, Harvey Allan H
Sensor Science Division, National Institute of Standards and Technology, 100 Bureau Dr, Gaithersburg, Maryland 20899.
Applied Chemicals and Materials Division, National Institute of Standards and Technology, 325 Broadway, Boulder, Colorado 80305.
J Vac Sci Technol A. 2019;37. doi: https://doi.org/10.1116/1.5092185.
Laser refractometers are approaching accuracy levels where gas pressures in the range 1 Pa < < 1 MPa inferred by measurements of gas refractivity at a known temperature will be competitive with the best existing pressure standards and sensors. Here, the authors develop the relationship between pressure and refractivity , via measurement at 293.1529(13) K and = 632.9908(2) nm for ≤ 500 kPa. The authors give values of the coefficients , , for six gases: Ne, Ar, Xe, N, CO, and NO. For each gas, the resulting molar polarizability has a standard uncertainty within 16 × 10· . In these experiments, pressure was realized via measurements of helium refractivity at a known temperature: for He, the relationship between pressure and refractivity is known through calculation much more accurately than it can presently be measured. This feature allowed them to calibrate a pressure transducer with helium and subsequently use the transducer to accurately gage the relationship between pressure and refractivity on an isotherm for other gases of interest.
激光折射仪的精度正在不断提高,在已知温度下通过测量气体折射率推断出的1 Pa< <1 MPa范围内的气体压力,将可与现有的最佳压力标准和传感器相媲美。在此,作者通过在293.1529(13) K和 = 632.9908(2) nm条件下对 ≤ 500 kPa的压力进行测量,得出了压力与折射率 之间的关系。作者给出了六种气体(Ne、Ar、Xe、N、CO和NO)的系数 、 、 的值。对于每种气体,所得的摩尔极化率 的标准不确定度在16×10· 以内。在这些实验中,通过在已知温度下测量氦气的折射率来实现压力测量:对于氦气,压力与折射率之间的关系通过计算得出,其准确性远高于目前的测量水平。这一特性使他们能够用氦气校准压力传感器 ,随后使用该传感器精确测量感兴趣的其他气体在等温线上压力与折射率之间的关系。