Xiao Huapan, Liang Rongguang, Spires Oliver, Wang Hairong, Wu Heng, Zhang YingYing
Opt Express. 2019 Sep 30;27(20):28364-28382. doi: 10.1364/OE.27.028364.
With single-point diamond turning (SPDT), a series of samples are processed under different cutting parameters. The brittle-ductile transition depth of ZnSe crystal is obtained, and the damages of the samples are measured from surface and subsurface damage depths as well as damage density. The effects of cutting parameters on the damages are investigated quantitatively. The results show the cutting depth has a minor while the feed has a major effects on the damages. Also, the interaction effect between feed and cutting depth is very small for surface damage depth or damage density, while it is large for subsurface damage depth. Based on the indentation mechanics and the kinetic characteristics of SPDT, a model is proposed to evaluate the surface and subsurface damage depths of ZnSe crystal by cutting parameters. The model has an average relative error less than 15.0%, which could be further used to obtain the depth and the removal characteristics of cracks in shoulder region.
采用单点金刚石车削（SPDT）工艺，在不同切削参数下加工一系列样品。获得了ZnSe晶体的脆韧转变深度，并从表面和亚表面损伤深度以及损伤密度方面测量了样品的损伤情况。定量研究了切削参数对损伤的影响。结果表明，切削深度对损伤影响较小，而进给量对损伤影响较大。此外，对于表面损伤深度或损伤密度，进给量和切削深度之间的交互作用非常小，而对于亚表面损伤深度，该交互作用较大。基于压痕力学和SPDT的动力学特性，提出了一个通过切削参数评估ZnSe晶体表面和亚表面损伤深度的模型。该模型的平均相对误差小于15.0%，可进一步用于获取肩部区域裂纹的深度和去除特性。
