Tokyo Institute of Technology, 4259 Nagatsuta, Midoriku, Yokohama, 226-8503 Japan.
JST PRESTO, 4259 Nagatsuta, Midoriku, Yokohama, 226-8503 Japan.
Phys Rev Lett. 2019 Oct 11;123(15):150801. doi: 10.1103/PhysRevLett.123.150801.
High-voltage transmission electron microscopes (HVTEMs), which can visualize internal structures of micron thick samples, intrinsically have large instrument sizes because of the static voltage isolation. In this Letter, we develop a compact HVTEM, employing a linear accelerator, a subpicosecond beam chopper, and a linear decelerator. 100 kV electrons initially accelerated by a static field are accelerated at radio frequency (rf) up to 500 kV, transmitting through the sample and finally rf decelerated down to 200 kV to be imaged through a 200 kV energy filter. 500 kV imaging, as well as subnanometer resolution at 200 kV, have been demonstrated.
高压透射电子显微镜（HVTEM）可以可视化微米厚样品的内部结构，由于静电隔离，其仪器尺寸本来就很大。在本研究中，我们开发了一种紧凑的 HVTEM，采用了线性加速器、亚皮秒束流斩波器和线性减速装置。最初由静电场加速的 100kV 电子在射频（rf）中加速到 500kV，穿过样品，最后通过 200kV 能量过滤器以射频减速到 200kV 进行成像。已经证明了 500kV 成像以及 200kV 时的亚纳米分辨率。
