School of Mechanical and Engineering, Nanjing University of Science and Technology, Nanjing 210094, China.
Sensors (Basel). 2019 Nov 18;19(22):5031. doi: 10.3390/s19225031.
A differential resonant voltage sensor with frequency output was developed by bonding two quartz crystal double-ended tuning forks (DETFs) on both sides of a piezo bimorph. The applied voltage induced tensile and compression deformation in the upper and bottom layers of the piezo bimorph, which caused the resonant frequency of the dual DETFs to increase and decrease, respectively. In this case, the differential output of the resonance frequencies of the dual DETFs greatly reduced the effect of temperature drift. In addition, the input resistance of the piezo bimorph reached a few hundred GΩ, which caused almost no influence on the DC voltage under test. The fabricated device showed a linear characteristic over its measurement range of ±700 V with a sensitivity of 0.75 Hz/V, a resolution of 0.007% (0.1 V) and hysteresis of 0.76% of the full range. The quality factor of the DETFs was about 3661 (in air). This novel resonant voltage sensor with its extremely low power consumption is promising for measuring or monitoring DC voltage in various fields.
研制了一种具有频率输出的差分谐振电压传感器，它将两个石英晶体双端调谐叉（DETF）分别粘贴在压电器件的上下两侧。施加的电压在上层和底层的压电器件中引起拉伸和压缩变形，从而导致双 DETFs 的谐振频率分别增加和减少。在这种情况下，双 DETFs 的谐振频率的差分输出极大地降低了温度漂移的影响。此外，压电器件的输入电阻达到几百 GΩ，这使得对测试的直流电压几乎没有影响。所制造的器件在其测量范围为±700 V 内表现出线性特性，灵敏度为 0.75 Hz/V，分辨率为 0.007%（0.1 V），滞后为全量程的 0.76%。DETF 的品质因数约为 3661（在空气中）。这种新型的低功耗谐振电压传感器有望用于测量或监测各种领域的直流电压。
