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金属 - 氧化物界面反应及其对氧化铌中集成电阻/阈值开关的影响。

Metal-oxide interface reactions and their effect on integrated resistive/threshold switching in NbO .

作者信息

Nath Shimul Kanti, Nandi Sanjoy Kumar, Li Shuai, Elliman Robert Glen

机构信息

Department of Electronic Materials Engineering, Research School of Physics, The Australian National University, Canberra, ACT 2601, Australia.

出版信息

Nanotechnology. 2020 Mar 20;31(23):235701. doi: 10.1088/1361-6528/ab7889. Epub 2020 Feb 20.

Abstract

Reactive metal electrodes (Nb, Ti, Cr, Ta, and Hf) are shown to play an important role in controlling the volatile switching characteristics of metal/NbO/Pt devices. In particular, devices are shown to exhibit stable threshold switching under negative bias but to have a response under positive bias that depends on the choice of metal. Three distinct responses are highlighted: Devices with Nb and Ti top electrodes are shown to exhibit stable threshold switching with symmetric characteristics for both positive and negative polarities; devices with Cr top electrodes are shown to exhibit stable threshold switching but with asymmetric hysteresis windows under positive and negative polarities; and devices with Ta and Hf electrodes are shown to exhibit an integrated threshold-memory (1S1M) response. Based on thermodynamic data and lumped element modelling these effects are attributed to the formation of a metal-oxide interlayer and its response to field-induced oxygen exchange. These results provide important insight into the physical origin of the switching response and pathways for engineering devices with reliable switching characteristics.

摘要

研究表明,活性金属电极(铌、钛、铬、钽和铪)在控制金属/NbO/Pt器件的挥发性开关特性方面起着重要作用。特别是,器件在负偏压下表现出稳定的阈值开关,但在正偏压下的响应取决于金属的选择。突出了三种不同的响应:具有铌和钛顶电极的器件在正负极性下均表现出具有对称特性的稳定阈值开关;具有铬顶电极的器件表现出稳定的阈值开关,但在正负极性下具有不对称的滞后窗口;具有钽和铪电极的器件表现出集成阈值-记忆(1S1M)响应。基于热力学数据和集总元件建模,这些效应归因于金属氧化物中间层的形成及其对场致氧交换的响应。这些结果为开关响应的物理起源以及设计具有可靠开关特性的器件提供了重要见解。

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