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基于向内弯曲开口环谐振器阵列的单片晶圆级小型化毫米波空气填充半模波导滤波器的微纳制造。

Microfabrication of monolithic wafer-level miniaturized millimeter-wave air-filled half-mode waveguide filter based on the inward curving split ring resonator array.

作者信息

Zhou Qihui, Jones Thomas R, Moghadas Hamid, Daneshmand Mojgan

机构信息

College of Electronic Science and Technology, National University of Defense Technology, Changsha, People's Republic of China. Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Canada.

出版信息

Nanotechnology. 2020 May 8;31(19):195202. doi: 10.1088/1361-6528/ab7048. Epub 2020 Feb 21.

DOI:10.1088/1361-6528/ab7048
PMID:32081838
Abstract

In this paper, we propose a miniaturized monolithic bandpass filter utilizing an air-filled half-mode waveguide and an inward curving split ring resonator array in the millimeter-wave band. The waveguide blocks the wave below cutoff frequency and the uniplanar array forms a rejection band above the transmission band. The microfabrication process of the filter adopts photoimageable technology and the combination of films with different thicknesses to build a 3D structure. The measured prototype has a center frequency at 65.5 GHz with a 3 dB fractional bandwidth of 30.7%. The minimum insertion loss is 2.1 dB. The proposed component offers excellent performance including a wide transmission band, a low pass-band insertion loss, an excellent isolation in the stop-band, and a steep roll-off at the upper cutoff frequency. Besides, due to the scalability of the waveguide and periodic array, this filter can be adapted for other frequency ranges.

摘要

在本文中,我们提出了一种毫米波频段的小型化单片带通滤波器,它利用了充气半模波导和向内弯曲的分裂环谐振器阵列。该波导可阻挡低于截止频率的波,而平面阵列在传输频段上方形成一个阻带。该滤波器的微制造工艺采用了可光成像技术以及不同厚度薄膜的组合来构建三维结构。所测量的原型中心频率为65.5GHz,3dB分数带宽为30.7%。最小插入损耗为2.1dB。所提出的组件具有优异的性能,包括宽传输频段、低通带插入损耗、阻带中出色的隔离度以及在上截止频率处的陡峭滚降。此外,由于波导和周期阵列的可扩展性,该滤波器可适用于其他频率范围。

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