Vibration sensing the mammalian way: an artificial Pacinian corpuscle.

A vibration sensor is presented mimicking the structure of the Pacinian corpuscle. A multi-step casting process is used to create a 5 mm diameter sensor with a liquid metal core, elastomer dielectric, and graphite counter electrode creating a spherical capacitive sensing element with sensitivities on the order of 10 Δ pF/mm. A model for the capacitance change of the spherical capacitor as it is formed is developed and its findings support the sensitivities observed. Various elastomer dielectric compositions with integrated barium titanate nanoparticles are tested to increase the dielectric constant. The biological acoustic filter within the corpuscle is mimicked using alternating cast layers of oligomers and elastomers around the spherical sensor element. Vibration sensing is characterized over the low frequency range of 10-300 Hz and the minimum detectable sensitivity is found to be 1 µm with a low power requirement of 7 mW. The artificial Pacinian corpuscle has potential applications in tactile sensing and seismic monitoring devices.