Liu Y G, Liu J L, Wu Q, Sun L T
Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China.
Rev Sci Instrum. 2020 Feb 1;91(2):023301. doi: 10.1063/1.5128393.
A very compact permanent magnet 2.45 GHz electron cyclotron resonance ion source has been designed and developed for various purposes. The microwave power is coupled into the plasma chamber using the coaxial antenna instead of the waveguide, the magnetic field is produced by two NdFeB permanent magnet rings, and the diameter of the source body is only 10 cm. The beam current under different conditions was measured. A maximum of 5.8 mA H/H /H mixed beam could be extracted from a 5.5 mm diameter extraction aperture.
为满足多种用途，设计并研制了一种结构紧凑的2.45 GHz永磁电子回旋共振离子源。微波功率通过同轴天线而非波导耦合到等离子体腔室中，磁场由两个钕铁硼永磁环产生，源体直径仅为10厘米。测量了不同条件下的束流。从直径5.5毫米的引出孔径中可引出最大5.8 mA的H/H /H混合束流。
