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用于大尺寸板状激光晶体的无空洞键合

Void-free bonding for a large slab laser crystal.

作者信息

Lin Yan-Yong, Gao Hong-Wei, Chen Zhong-Zheng, Xu Jia-Lin, Yuan Lei, Zuo Jun-Wei, Xu Yi-Ting, Guo Ya-Ding, Wang Bao-Shan, Xu Jian, Bo Yong, Peng Qin-Jun, Xu Zu-Yan

出版信息

Appl Opt. 2020 Jan 10;59(2):459-462. doi: 10.1364/AO.59.000459.

Abstract

A void-free bonding technique was demonstrated for a large slab Nd: YAG crystal with a bonding surface dimension of ∼160×70. By using the novel fluxless oxide layer removal technology, the indium-oxide barrier problem was resolved. With the help of electrochemical-polished indium solder and a plasma-cleaned heat sink, the solderability of the indium was enhanced; in particular, the contact angle of the solder was improved from 51° to 31°. With the largest-bonding-size slab, a single-slab laser created a maximum output power of 7.3 kW under an absorbed pump power of 12.8 kW, corresponding to an optical to optical efficiency of 57% and a slope conversion of 67.8%. By detecting the wavefront of the interferometer before and after bonding, the RMS of wavefront was 0.192 and 0.434 (=633), respectively. To the best of our knowledge, this is the largest void-free bonding size for a laser slab and the highest output power achieved from a single-slab crystal laser oscillator.

摘要

展示了一种用于键合表面尺寸约为160×70的大尺寸板状钕钇铝石榴石(Nd:YAG)晶体的无空隙键合技术。通过使用新型无助熔剂氧化层去除技术,解决了氧化铟阻挡问题。借助电化学抛光铟焊料和等离子体清洁的散热器,提高了铟的可焊性;特别是,焊料的接触角从51°提高到了31°。使用最大键合尺寸的板,单块板激光器在12.8kW的吸收泵浦功率下产生了7.3kW的最大输出功率,对应的光光效率为57%,斜率转换为67.8%。通过检测键合前后干涉仪的波前,波前的均方根(RMS)分别为0.192和0.434(=633)。据我们所知,这是激光板的最大无空隙键合尺寸,也是单块晶体激光振荡器实现的最高输出功率。

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