Martinez-Carranza Juan, Mikuła-Zdańkowska Marta, Ziemczonok Michał, Kozacki Tomasz
Opt Express. 2020 Mar 16;28(6):8185-8199. doi: 10.1364/OE.385743.
In this work, multi-incident digital holographic profilometry for microscale measurements is presented. This technique assembles the set of object fields from captured holograms for generation of the longitudinal scanning function (LSF). Numerical propagation is used for refocusing, and thus, the LSF can be determined at any given plane along the optical axis. The LSF takes maximum value for in focus object points, which are used to obtain full-field height distribution of the sample. This principle is the base of proposed measurement technique. Three capturing holograms strategies, which give control over the shape of the LSF, unambiguous measurement range, axial resolution, and noise immunity, are discussed. The conclusions of this work are supported by numerical and experimental results.
在这项工作中，提出了用于微尺度测量的多事件数字全息轮廓术。该技术从捕获的全息图中组装物场集，以生成纵向扫描函数（LSF）。数值传播用于重新聚焦，因此，可以在沿光轴的任何给定平面上确定LSF。LSF对于聚焦的物点取最大值，这些物点用于获得样品的全场高度分布。这一原理是所提出测量技术的基础。讨论了三种捕获全息图策略，这些策略可控制LSF的形状、明确的测量范围、轴向分辨率和抗噪声能力。这项工作的结论得到了数值和实验结果的支持。
