Cui Jian-Peng, Zhang Ning, Liu Jie, Wu Di-Long, Xu Hua, Yan Ding-Yao, Ma Ping
Opt Express. 2020 Mar 30;28(7):9454-9463. doi: 10.1364/OE.388625.
We present the use of a computer-generated hologram (CGH) to test the mid-spatial frequency error of a large aperture long-focal-length lens. In order to verify this test approach, a 450 mm × 450 mm reflective CGH is designed and fabricated for testing the 440 mm × 440 mm spatial filter lens. Both 0 and 1 order diffraction wavefront of CGH are measured, and the 0 order diffraction wavefront is used to calibrate the substrate error. The mid-spatial frequency wavefront error caused by the CGH fabrication errors are evaluated using the binary linear grating model and power spectral density (PSD) theory. Experimental results and error analysis show that the CGH test approach is also feasible for the measurement of mid-spatial frequency error, and the measurement accuracy of PSD1 can reach 0.8832 nm RMS.
我们展示了使用计算机生成全息图（CGH）来测试大口径长焦镜头的中空间频率误差。为了验证这种测试方法，设计并制作了一个450 mm×450 mm的反射式CGH，用于测试440 mm×440 mm的空间滤波镜头。测量了CGH的0阶和1阶衍射波前，并用0阶衍射波前校准基底误差。利用二元线性光栅模型和功率谱密度（PSD）理论评估了由CGH制作误差引起的中空间频率波前误差。实验结果和误差分析表明，CGH测试方法对于中空间频率误差的测量也是可行的，PSD1的测量精度可达0.8832 nm RMS。
