Xu Jia, Jia Delin, Liu Yi, Tian Yuan, Yu Xiaomei
Opt Express. 2020 Mar 30;28(7):10329-10336. doi: 10.1364/OE.385948.
We report a tunable terahertz (THz) metamaterial absorber (MA) actuated by thermomechanical bimaterial microcantilevers. The THz MA, which is suspended on a silicon substrate by the bimaterial microcantilevers, is a sandwich structure with a bottom Al ground plane, middle air and SiN dielectric layers, and a top Al rotationally symmetric open split ring resonator. Upon application of a current, a Ti heating resistor integrated on the SiN dielectric layer induces the bimaterial microcantilevers to bend, causing the air layer thickness to change, modulating the absorption of the THz MA. The tunable THz MA exhibited a relative modulation depth of absorption of 28.1% at 0.69 THz and a thermomechanical sensitivity of 0.12°/K. This tunable THz MA has potential applications in filtering, modulation, control, and THz imaging.
我们报道了一种由热机械双材料微悬臂梁驱动的可调谐太赫兹（THz）超材料吸收器（MA）。该太赫兹MA通过双材料微悬臂梁悬浮在硅衬底上，是一种三明治结构，具有底部Al接地平面、中间空气层和SiN介电层，以及顶部Al旋转对称开口分裂环谐振器。施加电流时，集成在SiN介电层上的Ti加热电阻会使双材料微悬臂梁弯曲，导致空气层厚度发生变化，从而调制太赫兹MA的吸收。该可调谐太赫兹MA在0.69 THz时的吸收相对调制深度为28.1%，热机械灵敏度为0.12°/K。这种可调谐太赫兹MA在滤波、调制、控制和太赫兹成像方面具有潜在应用。
