Neff Baptiste, Casset Fabrice, Millet Arnaud, Agache Vincent, Colin Mikael
CEA LETI, Univ. Grenoble Alpes, 38000 Grenoble, France.
Team ATIP/Avenir Mechanobiology Immunity and Cancer, Institute for Advanced Biosciences INSERM U1209 CNRS UMR 5309, 38054 Grenoble, France.
Micromachines (Basel). 2020 Mar 27;11(4):348. doi: 10.3390/mi11040348.
This paper reports on a new system for liquid density and viscosity measurement based on a freely suspended rectangular vibrating plate actuated by piezoelectric ceramic (PZT) actuators. The Lamb mode used for these measurements allows us to infer both the density and viscosity in a larger range as compared to the existing gold-standard techniques of MEMS resonators. The combination of the measured resonance frequency and quality factor enables extraction of density and viscosity of the surrounding liquid. The system is calibrated while performing measurements in water glycerol solutions with a density range from 997 to 1264 kg/m and viscosity from 1.22 to 985 mPa·s, which is a larger dynamic range compared to existing mechanical resonators showing an upper limit of 700 mPa·s. The out-of-plane vibrating mode exhibits quality factor of 169, obtained in deionized water (1.22 mPa·s viscosity), and 93 for pure glycerol with a viscosity of 985 mPa·s. This Lamb wave resonating sensor can achieve measurement in fairly large viscosity media while keeping a quality factor superior to 90. Measurements performed on oil validate the use of the Lamb system. Oil density is evaluated at 939 kg/m and dynamic viscosity at 43 mPa·s which corresponds to our expected values. This shows the possibility of using the sensor outside of the calibration range.
本文报道了一种基于由压电陶瓷(PZT)致动器驱动的自由悬浮矩形振动板的液体密度和粘度测量新系统。与现有的MEMS谐振器金标准技术相比,用于这些测量的兰姆波模式使我们能够在更大范围内推断密度和粘度。测量的共振频率和品质因数的组合能够提取周围液体的密度和粘度。该系统在密度范围为997至1264 kg/m³、粘度范围为1.22至985 mPa·s的水甘油溶液中进行测量时进行校准,与现有的机械谐振器相比,这是一个更大的动态范围,现有机械谐振器的上限为700 mPa·s。在去离子水(粘度为1.22 mPa·s)中获得的面外振动模式的品质因数为169,在粘度为985 mPa·s的纯甘油中为93。这种兰姆波谐振传感器可以在相当大粘度的介质中实现测量,同时保持品质因数优于90。对油进行的测量验证了兰姆系统的使用。测得油的密度为939 kg/m³,动态粘度为43 mPa·s,与我们的预期值相符。这表明在校准范围之外使用该传感器的可能性。