Zhao Lei, Yu Xinfeng, Li Pengzhi, Qiao Yanfeng
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Dongnanhu Road, 3888#, 130033 Changchun, People's Republic of China.
Robotics for Extreme Environments Lab (REEL), School of Electrical and Electronic Engineering, The University of Manchester, Manchester M139PL, United Kingdom.
Rev Sci Instrum. 2020 Mar 1;91(3):035004. doi: 10.1063/1.5141138.
The high resolution of lithography lenses has led to a requirement for high-precision lens-adjusting compensators. This paper presents the design, analysis, and testing of a high-precision two-degrees-of-freedom compliant mechanism to be used for lens XY micro-adjustment. The monolithic mechanism, which is based on a 1RR-2RRR configuration, uses flexure hinges to connect the movable inner ring with the fixed outer ring. The apparatus is driven using two piezoelectric actuators, and the lens terminal displacement is fed back in real time using two capacitive sensors. This paper describes the principle of the mechanism. Simulations and experiments are then performed to evaluate the system. The results show that the strokes along both the x-axis and the y-axis exceed ±25 µm. The accuracy of the proposed mechanism is better than ±7 nm. The root-mean-square induced figure error is better than 0.051 nm. The coupling z and tip/tilt rigid motions are less than 50 nm and 220 mas, respectively. The first natural frequency of the mechanism is 212 Hz. These results indicate that the mechanism has advantages that include high accuracy, low coupling errors, high rigidity, and compactness and that it will act as an efficient compensator for lithography lenses.
光刻透镜的高分辨率导致了对高精度透镜调节补偿器的需求。本文介绍了一种用于透镜XY微调节的高精度两自由度柔顺机构的设计、分析和测试。该整体机构基于1RR-2RRR构型，采用柔性铰链将可移动的内环与固定的外环连接起来。该装置由两个压电致动器驱动，并使用两个电容式传感器实时反馈透镜的终端位移。本文阐述了该机构的原理。然后进行了仿真和实验以评估该系统。结果表明，沿x轴和y轴的行程均超过±25 µm。所提出机构的精度优于±7 nm。均方根诱导像差优于0.051 nm。耦合z向和倾斜/俯仰刚体运动分别小于50 nm和220 mas。该机构的第一固有频率为212 Hz。这些结果表明，该机构具有高精度、低耦合误差、高刚性和紧凑性等优点，将成为光刻透镜的高效补偿器。
